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Cassette-less cleaning machine - List of Manufacturers, Suppliers, Companies and Products

Cassette-less cleaning machine Product List

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Cassette-less cleaning device

Achieving a high level of both quality and energy efficiency. Cleaner with a smaller amount of solution in the tank.

The "cassette-less cleaning device" is a product that allows for smooth robot transport without chipping and significantly reduces running costs. It uses Fine Sonic (high-frequency oscillator/transducer) to remove particles without causing damage. By adopting various super clean technologies, it resolves all the issues related to cassettes in cleaning. 【Features】 ■ Eliminates uneven cleaning in cassette contact areas ■ Achieves greater cleanliness with a smaller amount of cleaning solution in the tank ■ Significantly reduces power consumption ■ Minimizes the amount of cleaning solution during inter-tank transfers *For more details, please refer to the related links or feel free to contact us.

  • Ultrasonic Cleaner
  • Bio-related products Cleaning equipment

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300mm Cassette-less Cleaning System

Used in the chemical polishing process after final polishing / Batch processing of 50 pieces / Achieving high purity of 19nμm/5 pieces

<Equipment Overview> This device is used in the chemical polishing process after final polishing. Its feature is that it places 25 wafers in the gaps of 25 wafers, creating a half pitch, allowing for the simultaneous processing of 50 wafers. It achieves a high purity of 19nμm / 5 pieces.

  • 300mm_cassetteless_1.png
  • 300mm_cassetteless_2.png
  • Other semiconductor manufacturing equipment
  • Other cleaning machines

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