Cassette-less cleaning device (for wafer cleaning)
It is possible to remove particles without causing damage using Fine Sonic.
<Features> - Eliminates uneven cleaning of the cassette contact area. - Achieves greater cleanliness with a reduced amount of solution in the tank. - Significantly reduces power consumption. - Minimizes the amount of solution during inter-tank movement. - Uses Fine Sonic (high-frequency oscillator / transducer) to remove particles without causing damage.
- Company：プレテック
- Price：Other
